Porous Dielectrics in Microelectronic Wiring Applications
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چکیده
منابع مشابه
Porous Dielectrics in Microelectronic Wiring Applications
Porous insulators are utilized in the wiring structure of microelectronic devices as a means of reducing, through low dielectric permittivity, power consumption and signal delay in integrated circuits. They are typically based on low density modifications of amorphous SiO2 known as SiCOH or carbon-doped oxides, in which free volume is created through the removal of labile organic phases. Porous...
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ژورنال
عنوان ژورنال: Materials
سال: 2010
ISSN: 1996-1944
DOI: 10.3390/ma3010536